Electronic Materials

© Prof. Dr. Helmut Föll

University of Kiel; Faculty of Engineering

PDF-Version of Backbone

ZIP-Version of Hyperscript (63 MB!)

Materials in IC
 
This old drawing from the development of a 16 Mbit DRAM shows some of the more important Electronic Materials in their natural environment:
As part of an integrated circuit.
   
We have Silicon, Si, the undoubtedly most important material of electronics and Silicon Dioxide, SiO2, almost as important.
We have Aluminium, (Al) - somewhat enriched with a little bit of Cu, Si and whatnot - a material on its way out.
Then we have slightly exotic stuff: like Titanium Nitride (TiN) and Tungsten (W).
Moreover, we see that the combination if these materials only makes sense if they are in some intricate structure with rather small dimensions. Things even can go wrong, as indicated on the right hand side of the drawing.
The question is: Why Si and not GaAs or whatever, why W, TiN, and so on. Why is Al on its way out and what will come in? What are the requirements we have for electronic materials and how do these requirements translate to basic material properties, the manipulation of these properties, and the technologies required to produce the intricate structures that perform that electronic function?
   
If you want to learn a few things about Electronic Materials: Use this Hyperscript.
   

Which Browser?

This Hyperscript is optimized for the Windows Explorer.
Sorry - but Mozilla, Netscape etc. have problems with equations written entirely in HTML.
The link opens a "Check your Browser" page, which will show you if your browser is OK.
 

How to Start

Use the Menu. This leaves four alternatives:
Click on "Introduction" and start at the beginning.
Click on the chapter of interest and take it from there.
Click on "Project", click on "Matrix of Modules", and start with whatever looks interesting.
Click on "Indexlist", see what catches your eye, click on it and see what you get.
You will also find a button "Running Term" in the men. which gives you all the information about the actual lecture course.
Go the direct way
 

Background Information

If you click on "Project" in the menu (or here), you will find some more information about the structure of this Hyperscript and the philosophy behind it.
For example, if you like to read prefaces, you will find it there.
Many other metafiles are also accessible from there
This particlar Hyperscript is not yet totally complete, but all major modules are in place. New modules will be added, and the existing ones will be worked over all the time.
Figures, pictures, drawing and so on and the data or information contained therein are either from my own collection, or based on standard text book wisdom (see "Books") if not otherwise indicated,
There are more Hyperscripts available. If you are really curious about the Hyperscripts of "AMAT", you will find some information including a guided tour in the link.
The remaining menu buttons (e.g. Indexlist etc.) provide automatically generated cross-linked lists which might be useful if you are looking for specific items.

A Word of Warning and an Offer

This Hyperscript was not optimized for easy downloading, but contains many illustrations with large formats. If you would like to have it, send an e-mail for a free CD.
The Pdf version only contains the backbone, and pictures are downsized. The Zip version has it all, but it is 45 MB!
This Hyperscript is essentially a collection of (embellished) lecture notes. There are certainly still typos and real mistakes - use at your own risk.
If you want to participate in adding pages, illustrations, formulas, JAVA modules and the like, or simply offer advice or comments, please contact
Adress e-mails to . You must type it in, because direct links are susceptible to abuse.

Disclaimer: (Required by German Law)
Hiermit distanziere ich mich ausdrücklich von allen Inhalten aller gelinkten Seiten auf dieser Homepage und mache mir diese Inhalte nicht zu eigen. Diese Erklärung gilt für alle auf meinen Seiten angebrachten Links, die außerhalb meines direkten Einflussbereiches liegen.
H. Föll
Herewith I declare that I have nothing whatsoever to do with the content of linked pages as far as they are not my own, or not within my direct sphere of influence.
H. Foell
Impressum