4. Silicon: Special Properties and Emerging Technologies

4.1 Silicon on Insulator

4.1.1 General Remarks

4.1.2 Modern Developments

4.2 Etching of Silicon

4.2.1 General Remarks

4.2.2 Chemical Etching of Silicon

4.2.3 Electrochemical Etching, Porous Silicon and Applications

4.3 Specialities

4.3.1 Amorphous Si and Applications

4.3.2 SiGe: Materials Ascpects and Devices

4.4 Micro Electronic and Mechanical Systems (MEMS)

4.4.1 General Technologies


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© H. Föll (Semiconductor - Script)