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Note that any material that comes in
contact with the wafer or with materials that will come into contact with the
wafer, is an electronic material - utmost care has to be taken in
selecting the right stuff! |
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Wafer holders or tweezer, e.g., can
totally ruin a wafer by leaving minute amounts (far below the detection limit)
of heavy metals (most notably Fe) on the wafer if they are unsuitable
(Never, really never, touch the wafer with a metal tweezer!). |
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Gas pipes may corrode internally if
made from the wrong metal and thus contaminate the gas flowing through it with
traces of impurities - your factory then will only produce garbage. |
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Note also that some of the most
dangerous inorganic chemical are used! |
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HF (hydrofluoric acid) will cause heavy
tissue and especially bone damage already by its vapors - you do not even have
to touch it to get severly damaged. |
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PH3 (phosphine) and AsH3 (arsine)
are among the most toxic gases known to mankind; minute amounts are deadly
(PH3, in fact, was used as a poison gas in world war I). |
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To continue, use the
link |
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© H. Föll (Electronic Materials - Script)
6.1.1 Materials and Processes for Silicon Technology 
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