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Dirt in any form - as
"particles" on the surface of wafer, or as "contamination"
inside the wafer is almost always deadly |
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Particles with sized not much smaller than
minimum feature sizes (i.e. < 10 nm in 2007) will invariably
cover structures and lead to local dysfunction of a transistor or
whatever. |
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Point defects like metal atoms in the Si
lattice may precipitate and cause local short circuits etc. from the
"inside", killing transistors |
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One dysfunctional transistor out of
1.000.000.000 or so is enough to kill a chip! |
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Being extremely clean is absolutely
mandatory for high Yields Y! |
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Use cleanrooms and hyper-clean materials! |
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It won't be cheap! |
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© H. Föll
