Materials and Processes for Nanosystem Technologies

The chair  “Materials and Processes for Nanosystem Technologies” focuses on developing innovative deposition methods and novel materials for integration into Microelectromechanical systems (MEMS).

This includes functional thin films, especially based on piezoelectrics, pyroelectrics and ferroelectrics, as well as the agglomeration of porous 3D microstructures via atomic layer deposition (ALD).

Our research is strongly linked to the work of the Fraunhofer Institute for Silicon Technologies, where  Prof. Wagner is deputy institute leader.

In case you are interested in our work, wish to contribute or collaborate, feel free to contact us.