2017

 

  • S. Fichtner, N. Wolff, G. Krishnamurthy, A. Petraru, S. Bohse, F. Lofink, S. Chemnitz, H. Kohlstedt, L. Kienle, B. Wagner, Identifying and Overcoming the Interface Originating C-Axis Instability in Highly Sc-enhanced AlN for Piezoelectric Micro-Electromechanical Systems. Journal of Applied Physics 122, 035301, 2017

 

  • Roana de Oliveira Hansen, Maria Matefi-Tempfli, Romans Safonovs, Jost Adam, Steffen Chemnitz, Tim Reimer, Bernhard Wagner, Wolfgang Benecke, Stefan Matefi-Tempfli, Magnetic films for electromagnetic actuation in MEMS switches, Microsystem Technologies 2017, DOI 10.1007/s00542-017-3595-2

 

  • T. Lisec, S. Chemnitz, F. Lofink, T. Reimer, A. Kulkarni, G. Piechotta and B. Wagner, A novel technology for MEMS  based on the agglomeration of powder by atomic layer deposition, IEEE Proc. The 19th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2017, Kaohsiung, Taiwan, June 18-22, 2017, 427-430

 

  • T. Lisec, F. Stoppel, D. Kaden, F. Heinrich, A. Neumann and B. Wagner, MEMS switch with prolonged lifetime under hot switching conditions based on gold as contact material, IEEE Proc. The 19th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2017, Kaohsiung, Taiwan, June 18-22, 2017, 2043-2446

 

  • Fabian Lofink, Victor Tolstrup, Thomas Lisec, Tim Reimer, André Piorra, Dirk Meyners, Eckhard Quandt and Bernhard Wagner, Magnetically driven energy-harvester with monolithically integrated high-energy-density magnets, IEEE Proc. The 19th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2017, Kaohsiung, Taiwan, June 18-22, 2017, 351-354

 

  • A. Männchen, D. Beer, F. Niekiel, J. Nowak, F. Stoppel, B. Wagner, „Analysis of the mechanical vibration and acoustic behavior of a piezoelectric MEMS microspeaker“, 143rd International Convention of the Audio Engineering Society, New York, USA, October 18-21, 2017

 

  • F. Stoppel, C. Eisermann, S. Gu-Stoppel, D. Kaden, T. Giese and B. Wagner, Novel membrane-less two-way mems loudspeaker based on  piezoelectric dual-concentric actuators, IEEE Proc. The 19th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2017, Kaohsiung, Taiwan, June 18-22, 2017, 2047-2050

 

  • F. Stoppel, F. Niekiel, T. Giese, S. Gu-Stoppel, C. Eisermann, B. Wagner, „Neuartiger piezoelektrischer Zwei-Wege-MEMS-Lautsprecher“, MikroSystemTechnik Kongress 2017, Munich, Germany, October 23-25, 2017, 151-154

 

  • F. Stoppel, F. Niekiel, T. Giese, S. Gu-Stoppel, A. Männchen, J. Nowak, D. Beer, B. Wagner, Novel type of MEMs loudspeaker featuring membrane-less two-way sound generation, 143rd International Convention of the Audio Engineering Society, New York, USA, October 18-21, 2017

 

  • Ying Wang, Carlos André Bravo Costa, Elzbieta Karolina Sobolewska, Jacek Fiutowski, Robert Brehm, Jörg Albers, Eric Nebling, Fabian Lofink, Bernhard Wagner, Wolfgang Benecke, Horst‑Günter Rubahn, Roana de Oliveira Hansen, Micro‑cantilevers for optical sensing of biogenic amines, Microsystem Technologies, DOI 10.1007/s00542-016-3257-9

 

  • E. Yarar, A. Piorra, S. Fichtner, V. Tolstrup, T. Lisec, T. Reimer, F. Lofink, D. Meyners, B. Wagner, E. Quandt, Piezoelektrika für Energy-Harvester - Ein Vergleich. Proceedings: MikroSystemTechnik Kongress, 2017