Dr. Fabian Lofink
Telefon:
+49 (0) 4821 17-1198
Telefax:
+49 (0) 4821 17-4250
fabian.lofink@isit.fraunhofer.de
Research focus:
Ferroic functional materials for MEMS process technology:
- Ferroelectric ScAlN (piezo-MEMS)
- Powder magnets (powder-MEMS)
- Magnetostrictive material
The focus is on process integration and process technology, i.e. yield, uniformity, reproducibility, long-term stability, process compatibility, ....
Research results are applied to process flows for MEMS devices of optical and acoustic microsystems at the Fraunhofer Institute for Silicon Technology (MEMS-Applications). Optical MEMS (optical MEMS) refers to vector scanners and resonant MEMS scanners for various types of laser projection displays, for optical measurement and detection systems (e.g. LIDAR), for applications with high laser power in materials processing and generative manufacturing as well as for use in optical telecommunications. In acoustic microsystems (acoustic-MEMS), the results are used in miniaturized loudspeakers for wearables, hearing aids, AR/VR, wireless headphones, and smartphones.