Materials and Processes for Nanosystem Technologies

The chair “Technology for Silicon Based Micro- and Nanosystems” and the chair “Materials and Processes for Nanosystem Technologies” work in the field of Microelectromechanical systems (MEMS).

This includes modeling and simulation of MEMS devices, investigation of new materials and process capabilities, fabrication of micro systems and experimental characterisation.

In research this work is strongly linked to the work of the Fraunhofer Institute for Silicon Technologies, where  Prof. Wagner is the institute leader.