 |
We have the general expression for the
space charge
r(x) and the
Poisson equation: |
|
|
r(x) |
= |
e · {nh(x) –
ne(x) + ND+(x)
– NA–(x)} |
|
e e0 |
· |
d2V(x)
dx2 |
= |
– r(x) |
|
|
 |
V(x) is the internal
electrostatic potential due to the space charge region, resulting from the
flow of majority carriers to the other side. |
|
 |
The zero point of this
potential is set identical to the valence band edge in the bulk of the
p-side of the junction. |
|
 |
Since this side is negatively charged, the value of
V(x) increases towards the n-side. There it
reaches its maximum value, representing the increase in potential of a
test charge that has been moved against the field across the whole
junction. |
 |
The internal electric field due to the space
charge region (written in color to distinguish it
from the energy) is related to the internal electrostatic potential according
to the standard definition |
|
|
|
|
 |
We consider the arrangement shown in the
illustration: The
p-side is on the left (where x < 0) and the
n-side on the right (where x > 0). As a
consequence, V(x) has a positive slope, and the
electric field is negative. This corresponds to the polariy of the space
charges. |
 |
We consider a solution for the following approximations: |
1. |
All dopants are "ionized", i.e.
NA– =
NA = nh and
ND+ = ND =
ne. |
|
 |
This is always valid as long as the Fermi level is
not very close to a band edge. |
|
 |
For the carrier density we have the general expression |
|
|
ne,h |
= |
NeffC,V · exp |
æ
è |
– |
DE
kT |
ö
ø |
|
|
|
 |
Here, DE is
EC – EF for electrons and
EF – EV for holes. |
|
 |
If EC,V are functions of
x because the bands are bent (while EF
stays constant), we may write the energy difference as
DE = DE0 + e ·
V(x) for holes and DE =
DE0 + e ·
{V n – V(x)} for electrons,
with DE0 referring to the
relevant situation without band bending (i.e., in the respective bulk parts) and
V n being the constant value of the internal potential
in the n-type bulk part, i.e. V n is the maximum
value of V(x). |
|
 |
The carrier densities then become |
|
|
nh(x) |
= |
NeffV · exp |
æ
è |
– |
DE0 + eV(x)
kT |
ö
ø |
= |
NeffV · exp |
æ
è |
– |
DE0
kT |
ö
ø |
· exp |
æ
è |
– |
eV(x)
kT |
ö
ø |
|
|
|
|
|
|
|
|
|
|
= |
NA · exp |
æ
è |
– |
e · V(x)
kT |
ö
ø |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
ne(x) |
= |
NeffC · exp |
æ
è |
– |
DE0
+ e{V n – V(x)}
kT |
ö
ø |
= |
NeffC · exp |
æ
è |
– |
DE0
kT |
ö
ø |
· exp |
æ
è |
– |
e{V n – V(x)}
kT |
ö
ø |
|
|
|
|
|
|
|
|
|
|
= |
ND · exp |
æ
è |
– |
e · {V n – V(x)}
kT |
ö
ø |
|
|
|
|
|
|
|
|
|
 |
because the term with
DE0 gives the relevant
density in the bulk and that is the dopant density in our approximation. |
2. |
The density of the space charges is taken as
given by a box profile. |
|
 |
This is motivated by the fact that, as soon as
V(x) deviates noticeably from its constant value of
0 (in the p-type bulk) or V n (in the
n-type bulk) – in other words: inside the space charge region
– the carrier densities decrease exponentially from their values
NA or ND far outside of the
SCR. |
|
 |
The carrier densities then become |
|
|
nh |
= |
NA |
|
for |
|
x < – dA |
|
|
|
|
|
|
|
nh |
= |
0 |
|
for |
|
– dA < x < 0
|
|
|
|
|
|
|
|
ne |
= |
ND |
|
for |
|
x > dD |
|
|
|
|
|
|
|
ne |
= |
0 |
|
for |
|
0 < x < dD |
|
|
|
 |
With dA, dD
= boundaries of the space charge region with x = 0 at the
geometrical junction. |
 |
Thus, the space charge is
only given by the density of the dopants.
That's where we could have started right away, just plugging in the usual
assumptions. We have |
|
|
r |
= |
– NA |
|
for |
|
– dA < x
< 0 |
|
|
|
|
|
|
|
r |
= |
ND |
|
for |
|
0 < x <
dD |
|
|
|
|
|
|
|
r |
= |
0 |
|
for |
|
everywhere else |
|
|
 |
The Poisson equation then becomes |
|
|
d2V
dx2 |
= |
0 |
|
|
for |
|
– ¥ <
x < – dA |
|
|
|
|
|
|
|
|
d2V
dx2 |
= |
+ |
e
ee0 |
NA |
|
for |
|
– dA < x
< 0 |
|
|
|
|
|
|
|
|
d2V
dx2 |
= |
– |
e
ee0 |
ND |
|
for |
|
0 < x <
dD |
|
|
|
|
|
|
|
|
d2V
dx2 |
= |
0 |
|
|
for |
|
dD < x <
¥ |
|
|
|
 |
In addition, we have these boundary conditions: |
|
|
V |
= |
0 |
ö
÷
÷
÷
ø |
for |
|
x = – dA |
|
|
|
|
|
dV
dx |
= |
0 |
|
|
|
|
|
|
|
|
V |
= |
V n |
ö
÷
÷
÷
ø |
for |
|
x = dD |
|
|
|
|
|
dV
dx |
= |
0 |
|
|
|
|
|
|
|
|
dA · NA |
= |
dD · ND |
|
Charge neutrality |
|
|
 |
The solutions are easily obtained, they are |
|
|
VA(x) |
= |
e
2ee0 |
· NA · (dA
+ x)2 |
|
|
for
– dA < x < 0 |
VD(x) |
= |
V n – |
e
2ee0 |
· ND · (dD –
x)2 |
|
for
0
< x < dD |
V n |
= |
e
2ee0 |
(NA · dA2 +
ND · dD2) |
|
|
|
 |
The last equation comes from the condition of continuity at
x = 0, i.e. VD(x = 0) =
VA(x = 0). |
 |
The two limits of the space charge region,
dA and dD, as well as the
field strength E = – dV/dx in the SCR
thus could be calculated if we knew V n. |
|
 |
V n, of course, is the built-in
potential Ubi, i.e. it is the difference of the
potential across the SCR and thus identical to 1/e times the
difference of the Fermi energies before contact in thermal equilibrium; hence,
we have |
|
|
V n |
= |
EFn –
EFp
e |
=: |
DEF
e |
= |
Ubi |
|
|
|
 |
If we superimpose an external voltage Uext,
V n becomes (watch out for the correct sign!) |
|
|
|
 |
Now that we know (at least in principle) the
internal potential V(x), we can draw a band diagram
givging the total energy of the electrons
– and the latter is most important for the correct understanding of the
band bending (i.e., the dependence of EC,V on
x). Here is why: |
|
 |
In general, the potential energy of an arbitrary charge
q in an arbitrary electrostatic potential
V(x) is just q · V(x). |
|
 |
In the band structure of the p–n junction, we
need to include the potential energy of the electrons (remember that the band
structures of our semiconductors always give the energies of the electrons).
And since an electron carries a negative
elementary charge, we have to add the term q · V(x) =
–e · V(x) to the standard energy diagram coming
from the quantum-mechanical properties of the electrons. |
|
 |
Since this electrostatic term is negative, the band bending
shows the opposite behavior compared to that of the internal potential: Where
the latter goes up, the former goes down. |
 |
The following illustration shows
the whole situation in one drawing (without external voltage): |
|
|
|
 |
However, we still need to find the width
dSCR of the space charge region. |
|
 |
For this, we first consider the p–n
junction in equilibrium and only later add an external voltage. |
|
 |
The electric field is the strongest at the
inflection point of the internal potential, i.e., at x = 0;
the relevant absolute value is |
|
|
Emax |
= |
| E(x = 0) | |
= |
e
ee0 |
· NA · dA |
= |
e
ee0 |
· ND · dD |
|
|
|
 |
With this, the above explicit result for
V n can be written as |
|
|
V n |
= |
e
2ee0 |
(NA · dA2 +
ND · dD2) |
= |
1
2 |
Emax (dA +
dD) |
|
|
|
 |
Combining this with the relation expressing
charge neutrality, dA · NA =
dD · ND, and re-inserting the
relevant expression for the max. field strength, one finds for the boundaries
of the space charge region |
|
|
V n |
= |
1
2 |
Emax dA |
æ
è |
1 + |
NA
ND |
ö
ø |
|
Þ |
|
dA |
= |
2 V n
Emax |
|
ND
NA + ND |
= |
2 ee0
V n
e dA |
|
ND
NA (NA + ND) |
|
Þ |
|
dA |
= |
æ
ç
è |
|
2 ee0
V n
e |
|
ND
NA (NA + ND) |
|
ö
÷
ø |
1/2 |
V n |
= |
1
2 |
Emax dD |
æ
è |
1 + |
ND
NA |
ö
ø |
|
Þ |
|
dD |
= |
2 V n
Emax |
|
NA
NA + ND |
= |
2 ee0
V n
e dD |
|
NA
ND (NA + ND) |
|
Þ |
|
dD |
= |
æ
ç
è |
|
2 ee0
V n
e |
|
NA
ND (NA + ND) |
|
ö
÷
ø |
1/2 |
|
|
 |
We now can express the width
dSCR of the space charge region as |
|
|
= |
æ
ç
è |
|
2 ee0
V n
e (NA + ND) |
|
ö
÷
ø |
1/2 |
· |
æ
ç
è |
|
æ
è |
ND
NA |
ö
ø |
1/2 |
+ |
æ
è |
NA
ND |
ö
ø |
1/2 |
|
ö
÷
ø |
= |
æ
ç
è |
|
2 ee0
V n
e (NA + ND) |
|
ö
÷
ø |
1/2 |
· |
ND + NA
(NA ND)1/2 |
= |
æ
ç
è |
|
2 ee0
V n
e |
|
ND + NA
NA ND |
|
ö
÷
ø |
1/2 |
= |
æ
ç
è |
|
2 ee0
V n
e |
|
æ
è |
1
NA |
+ |
1
ND |
ö
ø |
|
ö
÷
ø |
1/2 |
|
|
 |
Replacing the internal potential by the Fermi
energy difference and including an external voltage, we obtain the final
result as |
|
|
dSCR |
= |
1
e |
æ
ç
è |
2ee0
· |
æ
è |
1
NA |
+ |
1
ND |
ö
ø |
· |
æ
è |
DEF + e
· Uext |
ö
ø |
ö
÷
ø |
1/2 |
|
|
|
|
|
© H. Föll (Semiconductors - Script)