Electronic Materials

© Prof. Dr. Helmut Föll


University of Kiel; Faculty of Engineering

PDF-Version of Backbone

ZIP-Version of Hyperscript (63 MB!)

Final Version        Oct 2019

Materials in IC
This old drawing from the development of a 16 Mbit DRAM shows some of the more important Electronic Materials in their natural environment:
As part of an integrated circuit.
We have Silicon, Si, the undoubtedly most important material of electronics and Silicon Dioxide, SiO2, almost as important.
We have Aluminium, (Al) - somewhat enriched with a little bit of Cu, Si and whatnot - a material on its way out.
Then we have slightly exotic stuff: like Titanium Nitride (TiN) and Tungsten (W).
Moreover, we see that the combination if these materials only makes sense if they are in some intricate structure with rather small dimensions. Things even can go wrong, as indicated on the right hand side of the drawing.
The question is: Why Si and not GaAs or whatever, why W, TiN, and so on. Why is Al on its way out and what will come in? What are the requirements we have for electronic materials and how do these requirements translate to basic material properties, the manipulation of these properties, and the technologies required to produce the intricate structures that perform that electronic function?
If you want to learn a few things about Electronic Materials: Use this Hyperscript.

How to Start

Use the Menu. This leaves four alternatives:
Click on "Introduction" and start at the beginning.
Click on the chapter of interest and take it from there.
Click on "Project", click on "Matrix of Modules", and start with whatever looks interesting.
Click on "Indexlist", see what catches your eye, click on it and see what you get.
Go the direct way

Background Information

This hyperscript used to be the script to a lecture course. The lecture course has not been given for years and now it is a kind of stand-alone "book". I have done some final editing but did not remove all allusions to the lecture course.
This hyperscript contains many peculiarities in its formatting and style of writing. This was done with some objectives in mind. Find out about this here.
There are more Hyperscripts available. If you are really curious about the Hyperscripts of "AMAT", you will find some information in the link.

Technical Information

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The "print friendly" and ".pdf" options only work for the "backbone" part of the Hyperscript (consult the "Matrix of Modules" for the meaning of "backbone").
If you click on "Project" in the menu (or here), you will find some more information about the structure of this Hyperscript and the philosophy behind it.
For example, if you like to read prefaces, you will find it there.
Many other metafiles are also accessible from there.
The remaining menu buttons (e.g. Indexlist etc.) provide automatically generated cross-linked lists which might be useful if you are looking for specific items.

Disclaimer: (Required by German Law)
Hiermit distanziere ich mich ausdrücklich von allen Inhalten aller gelinkten Seiten auf dieser Homepage und mache mir diese Inhalte nicht zu eigen. Diese Erklärung gilt für alle auf meinen Seiten angebrachten Links, die außerhalb meines direkten Einflussbereiches liegen.
H. Föll
Herewith I declare that I have nothing whatsoever to do with the content of linked pages as far as they are not my own, or not within my direct sphere of influence.
H. Foell
  It's all mine! However, I usually do give permission to use all of it if you ask me
Adress e-mails to . You must type it in, because direct links are susceptible to abuse.