Process Induced Defects: Large View of Tweezer Marks and Dislocations

Tweezer Marks   Dislocations
The tweezer marks consist of extremely small etch pits in high density - the hallmark of "haze". It is pretty safe to conclude that we are observing very small metal precipitates of some kind. The dislocations are marked by large and deep etch pits; sometimes slightly inclined. With a little experience in defect etching, they cannot be mistaken for anything else.
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© H. Föll (Defects - Script)