Impurity Diffusion in Si - Arrhenius Plot

Here are data of impurity diffusion in Si.
Quite trite - but these data are one of the basic cornerstones of the information society.

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go to 3.2.3 Diffusion of Impurity Atoms

go to Exercise 4.2-1 Diffusion During Cooling

© H. Föll (Defects - Script)