Impurity Diffusion in Si

Shown is a somewhat unusual representation of impurity diffusion that gives a direct feeling for the number of jumps and distances covered as a function of the temperature. It is evident that waiting for long, but still reasonable times does not help anymore if the temperature is too low.
Diffsuion inSi

With frame With frame as PDF

go to 3.3.1 Determination of Diffusion Profiles

go to 3.2.3 Diffusion of Impurity Atoms

go to 6.1.2 Infrared Microscopy

go to Iron precipitates in Si Integrated Circuits

© H. Föll (Defects - Script)