Inorganic Functional Materials

mawi-904: Micro/Nanosystems Technology

Contents

Introduction to micro- and nanosystems technology,especially:

  • optical and electron beam lithography
  • thin film deposition (PECVD, sputtering, evaporation, pulse laser deposition)
  • wet and dry etching
  • optical and scanning electron microscope inspection
The course will include the theoretical background in view of a typical device fabrication.

Lecturer(s)

Dates

Organizatorial

Please note that the course is held online. To get access to the first online meeting (8:15 am, 3rd of November) request an invitation by e-mail to Dirk Meyners using your student e-mail-account. E-mails send from other addresses will not be answered. Requirments: Basic Solid State Physics, Materials Science, Optics Written Examination

Recommended literature

1. Marc J. Madou, Fundamentals of microfabrication: the science of miniaturization, CRC Press, 2002 2. M.A. McCord, M.J. Rooks, Handbook of Microlithography, Micromachining and Microfabrication – Vol 1, SPIE Optical Engineering Press, 1997 3. P. Rai-Choudhury, Handbook of microlithography, micromachining, and microfabrication – Vol 2, SPIE Optical Engineering Press [u.a.], 1997 4. Chang Liu, Foundations of MEMS, Pearson Education, New Jersey, 2006 5. Sergey E. Lyshevski, MEMS and NEMS: Systems, Devices, and Structures, Series: Nano- and Microscience, Engineering, Technology and Medicine Volume: 2, CRC Press, New York, 2002

Lecture Notes

Send an e-mail to your lecturer to get access.

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