Nov 03, 2020 from 08:15 AM to 10:45 AM and more… – Online-Veranstaltung (Online-Veranstaltung)
mawi-904: Micro/Nanosystems Technology
Contents
Introduction to micro- and nanosystems technology,especially:
- optical and electron beam lithography
- thin film deposition (PECVD, sputtering, evaporation, pulse laser deposition)
- wet and dry etching
- optical and scanning electron microscope inspection
Lecturer(s)
Dates
Nov 06, 2020 from 11:15 AM to 12:45 PM and more… – Online-Veranstaltung (Online-Veranstaltung)
Organizatorial
Please note that the course is held online. To get access to the first online meeting (8:15 am, 3rd of November) request an invitation by e-mail to Dirk Meyners using your student e-mail-account. E-mails send from other addresses will not be answered. Requirments: Basic Solid State Physics, Materials Science, Optics Written Examination
Recommended literature
1. Marc J. Madou, Fundamentals of microfabrication: the science of miniaturization, CRC Press, 2002 2. M.A. McCord, M.J. Rooks, Handbook of Microlithography, Micromachining and Microfabrication Vol 1, SPIE Optical Engineering Press, 1997 3. P. Rai-Choudhury, Handbook of microlithography, micromachining, and microfabrication Vol 2, SPIE Optical Engineering Press [u.a.], 1997 4. Chang Liu, Foundations of MEMS, Pearson Education, New Jersey, 2006 5. Sergey E. Lyshevski, MEMS and NEMS: Systems, Devices, and Structures, Series: Nano- and Microscience, Engineering, Technology and Medicine Volume: 2, CRC Press, New York, 2002
Lecture Notes
Send an e-mail to your lecturer to get access.