Silicon based Nano- and Microtechnology

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Technische Fakultät
Kaiserstraße 2
24143 Kiel

Technology for Silicon Based Micro- and Nanosystems	Materials and Processes for Nanosystem Technologies
Prof Dr.-Ing Wolfgang Benecke E-Mail: wolfgang.benecke [at] isit.fraunhofer.de Tel.: +49 4821 17-42 10 Fax: +49 4821 17-42 50	Prof. Dr. Bernhard Wagner E-Mail: bernhard.wagner [at] isit.fhg.de Tel.:+49 4821 17-42 13 Fax: +49 4821 17-42 50

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tire [at] tf.uni-kiel.de

		Faculty of Engineering
	Christian-Albrechts-Universität zu Kiel	Technology for Silicon Based Micro- and Nanosystems & Materials and Processes for Nanosystem Technologies

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