Faculty of Engineering

Christian-Albrechts-Universität zu Kiel

   Technology for Silicon Based Micro- and Nanosystems &

Materials and Processes for Nanosystem Technologies

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Welcome to the Groups:



Technology for Silicon Based Micro- and Nanosystems Materials and Processes for Nanosystem Technologies
Prof Benecke

Prof Dr.-Ing Wolfgang Benecke
 Prof. Wagner

Prof. Dr. Bernhard Wagner