| Technology for
Silicon Based Micro- and Nanosystems &
Materials and Processes for Nanosystem
The chair “Technology for Silicon Based Micro- and Nanosystems” and the chair “Materials and Processes for Nanosystem Technologies” work in the field of Microelectromechanical systems (MEMS).
This includes modeling and simulation of MEMS devices, investigation of new materials and process capabilities, fabrication of micro systems and experimental characterisation.
In research this work is strongly linked to the work of the Fraunhofer institute for silicon technologies, where Prof. Benecke and Prof. Wagner are the institute leaders.
The teaching page for 2016 was updated.
The excursion to the Fraunhofer ISIT is scheduled for June 2nd, 2016.
+++ 11.02.2016 +++
Examination dates for the MST-Exams will be made available. See notice
on the blackboards.