4.2.3 Electrochemical Etching, Porous Silicon and Applications

	4.2 Etching of Silicon
			Chemical etches Isotropic and anisotropic dissolution, defect etches and anodic etching
			Micromechanics and microsystem technology Basic considerations, special process steps
			Electrochemical etching, Porous Silicon and applications Photonic crystals, filters, sensors, microtechnology, integrated wave guides, ...
	4.3 Specialities
				Amorphes Si and applications Structural and electronic properties, H - passivation, solar cells and FPDs
				SiGe: Materials ascpects and devices HEMT, detectors (incl. Ge),

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