X-Ray Topography

The big advantage of x-ray topography is that it can reveal the defect structure of large samples, in the case below whole (100 mm) Si wafers. If the negatives are enlarged, details on a 10 µm scale may be seen.

X-ray topography of a Si wafer showing "haze" (milky area in the upper right half) and dislocation structures. The isolated bright small rectangles are transistors full of dislocations

Enlargement of an area on the lower left. Some single dislocations are barely visible; the bright geometric structures correspond to device parts with high densities of dislocations.

With frame

6.2.1 X-Ray Topography