# Process Induced Defects: Large View of Tweezer Marks and Dislocations

| Tweezer Marks |  | Dislocations
| The tweezer marks consist of extremely small etch pits in high density - the hallmark of "haze". It is pretty safe to conclude that we are observing very small metal precipitates of some kind. |  | The dislocations are marked by large and deep etch pits; sometimes slightly inclined. With a little experience in defect etching, they cannot be mistaken for anything else.
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With frame

Process-Induced Defects in Silicon Wafers

Process-Induced Defects: Large View of Haze and stacking faults

© H. Föll (Defects - Script)