# Self-Diffusion in Si and some Metals

### Arrhenius Representation of Self-Diffusion Data in Si

| Here are some tracer self-diffusion data from various researchers (compiled by Frank et al., 1984).
| Note that extrapolations to D* differ by almost an order of magnitude.
| Be aware, that this discrepancy does not exist because some groups made "mistakes".
|  | Measurements are what they are: measurements. Its the data you got and, if you made a honest effort, there is nothing "wrong" about it.
|  | Why other groups obtain different data is an interesting question, often not easy to answer. While there must be reasons for it, its not because some groups are smart and others are dumb.

### Arrhenius Representation of Self-Diffusion Data in Cu, Ni, and Au

| Here some data for impurity diffusion in Si
| There is far less spread of the data compared to Si self diffusion.

With frame

Values for the Formation Enthalpy of Vacancies

3.2.2 Self-Diffusion

© H. Föll (Defects - Script)