# Impurity Diffusion in Si

| Shown is a somewhat unusual representation of impurity diffusion that gives a direct feeling for the number of jumps and distances covered as a function of the temperature. It is evident that waiting for long, but still reasonable times does not help anymore if the temperature is too low.

With frame

3.3.1 Determination of Diffusion Profiles

3.2.3 Diffusion of Impurity Atoms

6.1.2 Infrared Microscopy

Iron precipitates in Si Integrated Circuits

© H. Föll (Defects - Script)