# 7. Si MEMS

## 7.1 Products and Developments

### 7.1.1 What is MEMS?

### 7.1.2 A Closer Look at a Gyro

### 7.1.3 MEMS Sensors and Actuators

### 7.1.4 Summary to: 7.1 MEMS - Products and Developments

## 7.2 Processes and Specialities

### 7.2.1 Processes and Materials - General Consideration

### 7.2.2 Important MEMS Processes

### 7.2.3 Example for Process Integration

### 7.2.4 Summary to: 7.2 Processes and Specialities

## 7.3 Summary

### 7.3.1 Summary to 7: MEMS

© H. Föll (Semiconductor Technology - Script)