Running planning sheet; takes precedence to other documents containing the backbone

Blau im Unterkapitel: Seminarthema

Zahlenlinks: Literatur

1. Introduction
	1.1 Scope of the Course
		Goals and content
		Relation to other courses: - Introduction to Materials Science I + II - Semiconductor Technology - Electronic Materials - Others
		Required background knowledge - Math - Physics/Materials Science - Others
		Timetable, exercises, homework and seminar - Format of exercises - Exams and grading
	1.2 Semiconductors and Technology		Semiconductor Products and Materials
		General remarks; important markets and products	Findet jemand zu diesem und den nächsten beiden Punkten eine Übersicht?
		Mainstream semiconductor materials and technologies
		Exotic and upcoming semiconductors, products and technologies

2. Basic Semiconductor Physics
	2.1 Free Electron Gas, Periodic Potential, and Basic Band Structure
		Density of states, Fermi distribution,	MaWi II Script and Notes.
		Periodic potential, Bloch theorem
		Basic Band Structures, Direct and indirect transitions
		Doping, holes and electrons, Fermi level, carrier generation and recombination, mass action law, conductivity, life time and diffusion length	General: 19; 16
	2.2 Junctions and Simple Theory
		p-n-junction.	MaWi II Script and Notes. 19; 16
		solar cell, bipolar transistor, Schottky and ohmic contacts
	2.3 Elements of Advanced Theory
		Effective masses, Shockley-Read-Hall recombination, carrier mobilities, quasi Fermipotentials	SRH Recombination: 1 und 16; 17 for advanced
		Mobility and conductivity Boltzmann equation and scattering processes, temperature dependence
		Optical properties absorption, excitons, ...	Überwiegend in kap. 6 abhandeln
		Limits Leakage, degeneration, tunneling, avalanche break-through

3. Silicon: General Properties and Material Technologies
	3.1 General Properties
		Conductivity, lifetime and point defect dynamics Doping methods, measurement techniques, contamination and purity considerations	sehr kurz
		Diffusion Si anomaly, diffusion in theory and simulation, limits	sehr kurz
		Mechanical, thermal and other properties plastic deformation, rapid processing,	sehr kurz
	3.2 Crystal Growth and Wafer Production
		Single Crystals and wafers growth methods, bulk defects, wafer technology
		Polycrystalline Silicon CVD methods and Microelectronics, bull material and solar cells, flat panel displays
		Crystal lattice defects in Si Native and process-induced defects, OSFs, technological consequences and restraints
	3.3 Device and Product Consideration
		Interfaces and contacts Si-SiO2 Interface, Si - metal, silicides
		Scaling laws ...	Article aus VLSI serie

4. Silicon: Special Properties and Emerging Technologies
	4.1 Silicon on Insulator		SOI - Methods for Wafer Production SOI - Product and Technologies
		General advantages and problems, basic device structures	Short article: 22 und aus VLSi Serie ("Geschichte")
		Modern developments Oxygen Implantation; waferbonding, smart cut technology; Canon technology	mc: Bitte Überblick besorgen (auch für Seminarthemen)
		SOI and MEMS
	4.2 Silicon Microsystems		Thema und Material von Merz
		General and Key Processes	Semicond. Micromaching 22
		Chemical etches Isotropic and anisotropic dissolution, defect etches and anodic etching
		Micromechanics and microsystem technology Basic considerations, special process steps
	4.3 Specialities		Optical Applications of Porous Silicon Photonic Crystals and Semiconductors
		Amorphous Si and applications Structural and electronic properties, H - passivation, solar cells and FPDs	Tanaka 25
		SiGe: Materials aspects and devices HEMT, detectors (incl. Ge),	Findet jemand eine Übersicht? Evtl. über W. Jäger?
		Electrochemical etching, Porous Silicon and applications Photonic crystals, filters, sensors, microtechnology, integrated wave guides, ...

5. GaAs: Basics and High Speed Devices
	5.1 Theoretical Aspects of GaAs
		Crystallography and band structure
		Mobility and other important properties
		Lattice defects and variants (GaAlAs etc.),
		...
	5.2 Crystal Growth and Handling
		Crystal growth and thin film methods Bulk crystals, epitaxy, MBE
		GaAs specific materials and device aspects Handling (GaAs is poisonous), plastic deformation,
	5.3 High Speed Devices
		HEMT	Prost 23
		...
		...
		...

6. GaAs and III-V compounds: Fundamentals of Optoelectronics
	6.1 Fundamentals of Light Absorption and Emission
		Recombination, light emission and absorption, wave guides
		General optoelectronic device considerations LEDs, Ohmic contacts, Gate oxides, Doping, ..
		Photonic crystals
		...
	6.2 LEDs and Other Optical Devices
	6.3 Lasers
		Fundamentals of Lasers Basic theory, inversion, feedback, modes
		Essentials of semiconductor Lasers Requirements, technologies, lifetime and reliability

7. III-V Semiconductors: Materials and Device Aspects
	7.1 GaP, InSb and Ternary III-V Compounds		Findet jemand dazu einen kurzen Überblick?
		Special material properties
		Selected device aspects
	7.2 GaN
		Short history and specialities
		Blue LEDs and Laser
	7.3 Quantum Wells and Heterostructures
		Theoretical aspects
		Present applications
		Emerging technologies and outlook

8. Special Semiconductors, Applications and Technologies
	8.1 SiC and Diamond
		SiC	Artikel aus 27
		Diamond and high temperature applications
	8.2 Polymers		Semiconducting Polymers
		Theoretical and chemical aspects
		Emerging applications
	8.3 "Exotic" Semiconductors and Applications		Non-Silicon Solar Cells Liquid Semiconductors Peltier Elements and Thermoelectric Generators
		Thermoelectronics Peltier elements, thermoelectronic generator	Bitte dazu Übersichten suchen. Vor wenigen Jahren war dazu was längeres im Scientific American
		High temperature electronics	Bitte Seegebrecht um Übersichtsartikel bitten
		Se and copying machines	Bitte dazu Übersichten suchen.
		II-VI and chalkogenides	Bitte dazu Übersichten suchen.
		Very exotic: Liquid semicondurctors	Bitte dazu Übersichten suchen (es gab mal ein Buch)