Books Overview 2000/2001 Index | # Backbone, Books and Seminar # Masterdocument | Link to Matrix of Modules

Running planning sheet; takes precedence to other documents containing the backbone

Blau im Unterkapitel: Seminarthema

Zahlenlinks: Literatur

1. Introduction |
| 1.1 Scope of the Course |
| Goals and content |
| Relation to other courses: - Introduction to Materials Science I + II - Semiconductor Technology - Electronic Materials - Others |
| Required background knowledge - Math - Physics/Materials Science - Others |
| Timetable, exercises, homework and seminar - Format of exercises - Exams and grading |
| 1.2 Semiconductors and Technology | Semiconductor Products and Materials
| General remarks; important markets and products | Findet jemand zu diesem und den nächsten beiden Punkten eine Übersicht?
| Mainstream semiconductor materials and technologies |
| Exotic and upcoming semiconductors, products and technologies |

2. Basic Semiconductor Physics |
| 2.1 Free Electron Gas, Periodic Potential, and Basic Band Structure |
| Density of states, Fermi distribution, | MaWi II Script and Notes.
| Periodic potential, Bloch theorem |
| Basic Band Structures, Direct and indirect transitions |
| Doping, holes and electrons, Fermi level, carrier generation and recombination, mass action law, conductivity, life time and diffusion length | General: 19; 16
| 2.2 Junctions and Simple Theory |
| p-n-junction. | MaWi II Script and Notes. 19; 16
| solar cell, bipolar transistor, Schottky and ohmic contacts |
| 2.3 Elements of Advanced Theory |
| Effective masses, Shockley-Read-Hall recombination, carrier mobilities, quasi Fermipotentials | SRH Recombination: 1 und 16; 17 for advanced
| Mobility and conductivity Boltzmann equation and scattering processes, temperature dependence |
| Optical properties absorption, excitons, ... | Überwiegend in kap. 6 abhandeln
| Limits Leakage, degeneration, tunneling, avalanche break-through |

3. Silicon: General Properties and Material Technologies |
| 3.1 General Properties |
| Conductivity, lifetime and point defect dynamics Doping methods, measurement techniques, contamination and purity considerations | sehr kurz
| Diffusion Si anomaly, diffusion in theory and simulation, limits | sehr kurz
| Mechanical, thermal and other properties plastic deformation, rapid processing, | sehr kurz
| 3.2 Crystal Growth and Wafer Production |
| Single Crystals and wafers growth methods, bulk defects, wafer technology |
| Polycrystalline Silicon CVD methods and Microelectronics, bull material and solar cells, flat panel displays |
| Crystal lattice defects in Si Native and process-induced defects, OSFs, technological consequences and restraints |
| 3.3 Device and Product Consideration |
| Interfaces and contacts Si-SiO2 Interface, Si - metal, silicides |
| Scaling laws ... | Article aus VLSI serie

4. Silicon: Special Properties and Emerging Technologies |
| 4.1 Silicon on Insulator | SOI - Methods for Wafer Production SOI - Product and Technologies
| General advantages and problems, basic device structures | Short article: 22 und aus VLSi Serie ("Geschichte")
| Modern developments Oxygen Implantation; waferbonding, smart cut technology; Canon technology | mc: Bitte Überblick besorgen (auch für Seminarthemen)
| SOI and MEMS |
| 4.2 Silicon Microsystems | Thema und Material von Merz
| General and Key Processes | Semicond. Micromaching 22
| Chemical etches Isotropic and anisotropic dissolution, defect etches and anodic etching |
| Micromechanics and microsystem technology Basic considerations, special process steps |
| 4.3 Specialities | Optical Applications of Porous Silicon Photonic Crystals and Semiconductors
| Amorphous Si and applications Structural and electronic properties, H - passivation, solar cells and FPDs | Tanaka 25
| SiGe: Materials aspects and devices HEMT, detectors (incl. Ge), | Findet jemand eine Übersicht? Evtl. über W. Jäger?
| Electrochemical etching, Porous Silicon and applications Photonic crystals, filters, sensors, microtechnology, integrated wave guides, ... |

5. GaAs: Basics and High Speed Devices |
| 5.1 Theoretical Aspects of GaAs |
| Crystallography and band structure |
| Mobility and other important properties |
| Lattice defects and variants (GaAlAs etc.), |
| ... |
| 5.2 Crystal Growth and Handling |
| Crystal growth and thin film methods Bulk crystals, epitaxy, MBE |
| GaAs specific materials and device aspects Handling (GaAs is poisonous), plastic deformation, |
| 5.3 High Speed Devices |
| HEMT | Prost 23
| ... |
| ... |
| ... |

6. GaAs and III-V compounds: Fundamentals of Optoelectronics |
| 6.1 Fundamentals of Light Absorption and Emission |
| Recombination, light emission and absorption, wave guides |
| General optoelectronic device considerations LEDs, Ohmic contacts, Gate oxides, Doping, .. |
| Photonic crystals |
| ... |
| 6.2 LEDs and Other Optical Devices |
| 6.3 Lasers |
| Fundamentals of Lasers Basic theory, inversion, feedback, modes |
| Essentials of semiconductor Lasers Requirements, technologies, lifetime and reliability |

7. III-V Semiconductors: Materials and Device Aspects |
| 7.1 GaP, InSb and Ternary III-V Compounds | Findet jemand dazu einen kurzen Überblick?
| Special material properties |
| Selected device aspects |
| 7.2 GaN |
| Short history and specialities |
| Blue LEDs and Laser |
| 7.3 Quantum Wells and Heterostructures |
| Theoretical aspects |
| Present applications |
| Emerging technologies and outlook |

8. Special Semiconductors, Applications and Technologies |
| 8.1 SiC and Diamond |
| SiC | Artikel aus 27
| Diamond and high temperature applications |
| 8.2 Polymers | Semiconducting Polymers
| Theoretical and chemical aspects |
| Emerging applications |
| 8.3 "Exotic" Semiconductors and Applications | Non-Silicon Solar Cells Liquid Semiconductors Peltier Elements and Thermoelectric Generators
| Thermoelectronics Peltier elements, thermoelectronic generator | Bitte dazu Übersichten suchen. Vor wenigen Jahren war dazu was längeres im Scientific American
| High temperature electronics | Bitte Seegebrecht um Übersichtsartikel bitten
| Se and copying machines | Bitte dazu Übersichten suchen.
| II-VI and chalkogenides | Bitte dazu Übersichten suchen.
| Very exotic: Liquid semicondurctors | Bitte dazu Übersichten suchen (es gab mal ein Buch)