# MEMS material for talk

## Resources:

Where | Title | Ranking
Semiconductor international / Prof. Föll | MEMS e-insite.net/semiconductor | introduction, markets, major organisations
Materials Today / Prof. Föll | Optical MEMS | fabrication, special optical applications
Materials Today / Prof. Föll | Micromechanics senses biomolecules | biological applications of MEMS, good
Prof. Föll | Semiconductor Micromachining – Vol. 2 (!) | only written book available at the faculty
http://www.tu-harburg.de/mst/deutsch/lehre/mikrosystemtechnik/mst_eng.shtml | Microsystem Engineering | Lecture notes from Prof. Kasper, TU Hamburg-Harburg, detailed, but good
http://www.mst-world.com/ | World of MEMS | very good, good links, overview etc.
http://www.memsguide.com | Memsguide.com | mixed site, good links
Phys.Jour. (german) 1(2002) 39 / Library | Mikrosystemtechnik im Automobil | Introduction, technique, major commercial applications
Prof. Föll | Micromirrors | Several documents from Peter Merz, ISIT concerning MEMS micro mirrors, also demonstrators available!! (ask Prof. Föll)
http://www.iop.org/EJ/S/3/249/journal/0960-1317 | Journal of Micromechanics and Microengineering | Scientific journal on MEMS, not reviewed
http://www.e-insite.net/semiconductor/ | Semiconductor international | General journal, good entry, but you have to search it
http://www.materialstoday.com | Materials Today | Good reviews, good entry, but you have to search it
Spektrum der Wissenschaften Dossier / Prof. Föll (german) | Mikrosystemtechnik | old, but much content
http://www.nexus-emsto.com/ | Network Microsystems European | Europe’s largest MEMS organisation, no substantial information
http://www.memsindustrygroup.org | MEMS Industry group | mostly American MEMS industry association, good link list, business/market analysis

## Key words:

- meaning of MEMS, typical sizes, history
- technique: anisotropic etching, difference bulk/surface micromaching/LIGA, plasma etching
- process integration
- difference and examples for sensors / actuators; current products & their principle of operation (airbag, inkjet nozzles, Texas instruments projector, BioMEMS, …)
- markets
- limiting factors (also ecomically!!!)