### 5.3.2 Summary to: 5.3 Cleanrooms, Particles and Contamination

| Dirt in any form - as "particles" on the surface of wafer, or as "contamination" inside the wafer is almost always deadly |  |
|  | Particles with sized not much smaller than minimum feature sizes (i.e. < 10 nm in 2007) will invariably cover structures and lead to local dysfunction of a transistor or whatever. |
|  | Point defects like metal atoms in the Si lattice may precipitate and cause local short circuits etc. from the "inside", killing transistors |
|  | One dysfunctional transistor out of 1.000.000.000 or so is enough to kill a chip! |
| Being extremely clean is absolutely mandatory for high Yields Y! |  |
|  | Use cleanrooms and hyper-clean materials! |  |
|  | It won't be cheap! |  |

© H. Föll (Electronic Materials - Script)