Teaching

Lecture

Sensors	Introduction
	Microsensors
	Microsensors 2
	Biosensors
	Piezoelectric Sensors
	Piezoelectric Sensors 2
	Magnetic Field Sensors
	Magnetic Field Sensors 2
	Magnetostrictive TMR Sensor
	Magnetoelectric Composites


MST	Introduction
	Cleanroom & Vacuum Technology
	Wafer Substrate Materials
	Chemical Vapor Deposition
	MST Safety Briefing
	Physical Vapor Deposition
	UV-Lithography
	Materials I
	Silicon Doping
	Materials II
	Wafer Bonding
	Enhanced UV, Electron & Focused Ion Beam Lithography
	Dry Etching I
	Dry Etching II
	Revised Schedule
	Wet Etching
	Chemical Mechanical Polishing
	Surface Micromachining
	LIGA
	Piezoresistive Sensors
	Capacitive Sensors - Electrostatic Actuators
	Pressure Sensors
	Inertial Sensors
	Optical MEMS
	Thermal MEMS
	Pulse Electroplating



Ceramics and Glasses	Part 1
	Part 2
	Part 3
	Part 4
	Part 5
	Part 6
	Part 7
	Script


Werkstoffe (Keramik) - WS 2011/12	Chpt. 1: Introduction
	Chpt. 2: Structure and Microstructure
	Chpt. 3: Defects and Diffusion
	Chpt. 4: Fabrication of Ceramic Materials
	Chpt. 5: Mechanical Properties
	Chpt. 6: Structural ceramics
	Chpt. 7: Hard coatings
	Chpt. 8: Dielectrics
	Chpt. 9: Ion conduction
	Chpt. 10: Magnetics


Smart Materials	Part 1 (p 1-65)
	Part 2 (p 66-131)
	Part 3 (p 132-191)
	Part 4 (p 192-251)
	Part 5 (p 252-311)
	Magnetic Shape Memory
	Piezoelectric and Electrostrictive Materials
	Magnetoelectric Materials

Smart Materials Exercises	Organizational
	ppt template
	List of papers
	Shape memory alloys #1
	Shape memory alloys #2a (optional paper here) Shape memory alloys #2b (optional paper here)
	Shape memory alloys #3a Shape memory alloys #3b
	Shape memory alloys #4
	Magnetostriction #1a Magnetostriction #1b
	Magnetostriction #2
	Magnetostriction #3
	Ferromagnetic shape memory alloys #1
	Ferromagnetic shape memory alloys #2a Ferromagnetic shape memory alloys #2b
	Piezoelectric materials #1a Piezoelectric materials #1b
	Piezoelectric materials #2
	Magnetoelectric composites#1a Magnetoelectric composites#1b
	Electroactive polymers

Responsible for this page: gs at tf.uni-kiel.de

		Faculty of Engineering
	Christian-Albrechts-Universität zu Kiel	Lehrstuhl für Anorganische Funktionsmaterialien