Teaching

Lecture

Sensors	Introduction
	Microsensors
	Microsensors 2
	Biosensors
	Piezoelectric Sensors
	Piezoelectric Sensors 2
	Magnetic Field Sensors
	Magnetic Field Sensors 2
	Magnetostrictive TMR Sensor
	Magnetoelectric Composites


MST	Introduction
	Cleanroom & Vacuum Technology
	Physical Vapor Deposition
	Safety Briefing
	Chemical Vapor Deposition
	UV Lithography
	Resolution Enhancement Techniques
	Wafer Substrate Materials
	Silicon Doping
	Dry Etching I
	Dry Etching II
	Materials I
	Materials II
	Wet Etching
	Particle Beam Lithography
	CMP
	Wafer Bonding_2012
	Surface Micromachining
	Piezoresistive Sensors
	Capacitive Sensors - Electrostatic Actuators
	Pressure Sensors
	Inertial Sensors
	Optical MEMS
	Thermal MEMS



Advanced Materials B (Part II)	Part 1
	Part 2
	Part 3
	Part 4
	Part 5
	Part 6


Werkstoffe (Keramik) - WS 2011/12	Chpt. 1: Introduction
	Chpt. 2: Structure and Microstructure
	Chpt. 3: Defects and Diffusion
	Chpt. 4: Fabrication of Ceramic Materials
	Chpt. 5: Mechanical Properties
	Chpt. 6: Structural ceramics
	Chpt. 7: Hard coatings
	Chpt. 8: Dielectrics
	Chpt. 9: Ion conduction
	Chpt. 10: Magnetics


Smart Materials	Part 1 (p 1-65)
	Part 2 (p 66-131)
	Part 3 (p 132-191)
	Part 4 (p 192-251)
	Part 5 (p 252-311)
	Part 6 (p 312-414)
	Part 7 (p 415-463)
	Part 8 (p 464-477)
	Magnetic Shape Memory
	Piezoelectric and Electrostrictive Materials
	Magnetoelectric Materials

Smart Materials Exercises	Organizational
	ppt template
	Paper assignment (updated on 2012-12-10)
	Paper (zip)

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		Faculty of Engineering
	Christian-Albrechts-Universität zu Kiel	Lehrstuhl für Anorganische Funktionsmaterialien